Fabrication
Metalorganic vapour phase epitaxy (MOVPE) is the most popular deposition technology for the formation of compound semiconducting thin films for devices. It uses ultrapure metalorganics and / or hydrides as precursor source materials in an ambient gas such as hydrogen.
Other techniques of choice include:
- Molecular beam epitaxy (MBE)
- Hydride vapour phase epitaxy (HVPE)
- Liquid phase epitaxy (LPE)
- Metal-organic molecular beam epitaxy (MOMBE)
- Atomic layer deposition (ALD)
Read more about this topic: Compound Semiconductors
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